赵义恒,王晨先,李伟

• 1:北京信息科技大学理学院
• 2:天目山实验室

摘要(Abstract)：

为满足惯性类多物理量检测需求，提出一种基于频差检测的耦合微机械谐振器多重传感方案，旨在实现质量与加速度的同步高精度测量。通过耦合梁理论建立了含静电激励的系统动力学模型，结合理论分析与有限元仿真对关键结构参数与驱动条件进行了优化。研究引入频差法分别检测质量扰动与加速度扰动，并系统考察了耦合强度对2类频差响应的影响。结果表明，质量扰动与加速度扰动引起的频差响应均表现出良好的线性特征，同时耦合强度对检测灵敏度具有显著调控作用，验证了该方案在多重物理量同步传感领域的可行性与有效性。

关键词(KeyWords)： 传感器;模态耦合;多重传感;频差法

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金青年基金项目(12202069);; 北京市教委科研计划科技一般项目(KM202311232009)

作者(Author): 赵义恒,王晨先,李伟

DOI: 10.16508/j.cnki.11-5866/n.2026.04.006

参考文献(References)：

• [1]江楚悦，黄海超，江河.智能医疗监测系统中的物联网传感器技术应用[J].山西电子技术，2025(6):59-61.Jiang Chuyue,Huang Haichao,Jiang He. Application of IOT sensor technology in intelligent medical monitoring system[J].Shanxi Electronic Technology,2025(6):59-61.(in Chinese)
• [2]陈雪，徐桂芝.面向健康监测的柔性可穿戴传感器研究进展[J].生物医学工程学杂志，2025,42(6):1273-1280.Chen Xue,Xu Guizhi. Research progress on flexible wearable sensors for health monitoring[J]. Journal of Biomedical Engineering,2025,42(6):1273-1280.(in Chinese)
• [3]Serrano M,Larkin K,Tretiak S,et al. Performance of multifunctional piezoelectric energy harvesting microgyroscopes with material degradation[J]. European Journal of Mechanics-A/Solids,2023,99:104902.
• [4]Serrano M,Larkin K,Abdelkefi A. Performance analysis of functionally graded multifunctional piezoelectric energy harvesting microgyroscopes[J]. International Journal of NonLinear Mechanics,2023,157:104521.
• [5]Rabenimanana T,Walter V,Kacem N,et al. Nonlinear analytical model of two weakly coupled MEMS cantilevers for mass sensing using electrostatic actuation[C]//Proceedings of Eurosensors2018,2018,2(13):1084.
• [6]Rabenimanana T,Walter V,Kacem N,et al. Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths:design and experimental model validation[J].Sensors and Actuators A:Physical,2019,295:643-652.
• [7]Rabenimanana T,Walter V,Kacem N,et al. Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation[J]. Smart Materials and Structures,2021,30(7):07LT01.
• [8]Li Lei,Liu Hanbiao,Shao Mingyu,et al. A novel frequency stabilization approach for mass detection in nonlinear mechanically coupled resonant sensors[J]. Micromachines,2021,12(2):178.
• [9]Enami W,Yabuno H,Yamamoto Y,et al. Mode shift detection of coupled resonators through parametric resonance and its application to mass sensing[J]. Nonlinear Dynamics,2022,110(1):117-129.
• [10]杨健.耦合悬臂梁模态局部化质量检测研究[D].长春：吉林大学，2022.Yang Jian. Study on mode localization based mass detection with an asymmetrically coupled trio[D]. Changchun:Jilin University,2022.(in Chinese)
• [11]刘汉彪，王发光，刘晨，等.基于模态局部化的可调式压电驱动谐振质量传感器的设计[J].压电与声光，2022,44(6):877-884.Liu Hanbiao,Wang Faguang,Liu Chen,et al. Design of tunable piezoelectric driven resonant mass sensor based on modal localization[J]. Piezoelectrics&Acoustooptics,2022,44(6):877-884.(in Chinese)
• [12]Xiong Liuyang,Tang Lihua. On the sensitivity analysis of modelocalized sensors based on weakly coupled resonators[J].Journal of Vibration Engineering&Technologies,2023,11(3):793-807.
• [13]Fang Zhengliang,Theodossiades S,Ruzziconi L,et al. A multisensing scheme based on nonlinear coupled micromachined resonators[J]. Nonlinear Dynamics,2023,111(9):8021-8038.
• [14]Fang Zhengliang,Theodossiades S,Hajjaj A Z. Triple sensing scheme based on nonlinear coupled micromachined resonators[J]. Nonlinear Dynamics,2023,111(24):22185-22213.
• [15]Fang Zhengliang,Theodossiades S,Dejene F,et al. Dynamics of a piezoelectric mems gas sensor based on coupled micromachined resonators[C]//2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications(PowerMEMS),2023:19-22.
• [16]Roy R,Dwivedy S K. Nonlinear dynamic analysis of a spring coupled double beam based piezoelectric energy harvester under parametric base excitation[J]. Mechanics Based Design of Structures and Machines,2024,52(12):10516-10538.
• [17]Ghommem M,Najar F,Rabenimanana T,et al. Modeling and experimental verification of coupled beam arrays for mass sensing[C]//2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems(NEMS),2024:1-4.
• [18]Najar F,Ghommem M,Rabenimanana T,et al. Differential capacitive mass sensing based on mode localization in coupled microbeam arrays[J]. Mechanical Systems and Signal Processing,2024,220:111648.
• [19]Yu Lihui,Jiang Qi,Wang Feiwen. A force sensor based on FPI for flexible needle force sensing[J]. Optical Fiber Technology,2024,88:104012.
• [20]冯昊楠.基于耦合倍频机制的阵列结构设计及压力感测特性研究[D].长春：吉林大学，2021.Feng Haonan. Research on array structure design and pressure sensing characteristics based on coupling frequency multiplication mechanism[D]. Changchun:Jilin University,2021.(in Chinese)
• [21]王徐康，黄强先，郭天武，等.弱耦合谐振式超高灵敏度微力传感器[J].光学精密工程，2025,33(23):3714-3722.Wang Xukang,Huang Qiangxian,Guo Tianwu,et al. Weakly coupled resonant ultra-high sensitivity micro-force sensor[J].Optics and Precision Engineering,2025,33(23):3714-3722.(in Chinese)
• [22]Fang Zhengliang,Theodossiades S,Jaber N,et al. Exploiting nonlinearity for sensitivity enhancement of novel tunable and low-power thin-film piezoelectric-on-silicon(TPoS)micromachined gas sensor[J]. Measurement,2025,246:116559.
• [23]Serrano M, Larkin K, Ghommem M, et al. Broadband piezoelectric energy harvesting microgyroscopes:design and nonlinear analysis[J]. European Journal of Mechanics-A/Solids,2023,98:104888.